Optimization of diffusion batch size based on real-time information

Diffusion is one of the operations that are run on batching basis in semiconductor fabrication. Due to its long processing time and being non-pre-emptive, operators and supervisors on the shop floor are frequently facing the dilemma that whether to launch the next batch promptly with availa...

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Bibliographic Details
Main Author: Zhang, Chenru
Other Authors: Wu Kan
Format: Thesis
Language:English
Published: 2013
Subjects:
Online Access:http://hdl.handle.net/10356/54719