Micro EDM process
The development of micro electromechanical systems (MEMS) has demanded various techniques in producing high precision micro mechanical components. Micro EDM plays an important role for its superiority in specific processes, and a complementary role with LIGA processes in creating sophisticated MEMS...
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| Format: | Thesis |
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2008
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| Online Access: | http://hdl.handle.net/10356/5500 |