Development and characterization of PZT thin films
Fabrication processes and testing of the completed devices were carried out at NTU Micro-Machine Center. X-ray diffraction analysis and the Polarisation-Field (P-E hysteresis loops) of PZT thin film were measured to characterize the film quality and the electrical properties. The process to fabricat...
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| Format: | Thesis |
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2008
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| Online Access: | http://hdl.handle.net/10356/5574 |