Development and characterization of PZT thin films

Development and characterization of PZT thin films

Fabrication processes and testing of the completed devices were carried out at NTU Micro-Machine Center. X-ray diffraction analysis and the Polarisation-Field (P-E hysteresis loops) of PZT thin film were measured to characterize the film quality and the electrical properties. The process to fabricat...

书目详细资料
主要作者:	Zhou, Min.
其他作者:	Miao, Jianmin
格式:	Thesis
出版:	2008
主题:	DRNTU::Engineering::Materials::Microelectronics and semiconductor materials::Thin films
在线阅读:	http://hdl.handle.net/10356/5574

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