Development of optical sensing based mems fabry- perot pressure sensors
Optical metrology offers significant advantages in remote sensing and has been recently developed as an alternative to conventional piezoresistive and capacitive sensing techniques used for sensing applications capable of operating in harsh environments. Recent advancement in silicon micromachining...
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| Format: | Thesis |
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2008
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| Online Access: | https://hdl.handle.net/10356/5767 |