Co2 laser annealing of Niti (shape memory) thin films for mems applications
A new technique is presented to characterize the shape memory effect in a local area on a micrometer scale, because all traditional techniques, such as differential scanning calorimeter and resistance measurement, are not applicable in a thin film of such a size.
| Main Author: | |
|---|---|
| Other Authors: | |
| Format: | Thesis |
| Published: |
2008
|
| Subjects: | |
| Online Access: | http://hdl.handle.net/10356/5786 |