Co2 laser annealing of Niti (shape memory) thin films for mems applications
A new technique is presented to characterize the shape memory effect in a local area on a micrometer scale, because all traditional techniques, such as differential scanning calorimeter and resistance measurement, are not applicable in a thin film of such a size.
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| Format: | Thesis |
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2008
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| Online Access: | http://hdl.handle.net/10356/5786 |
| Summary: | A new technique is presented to characterize the shape memory effect in a local area on a micrometer scale, because all traditional techniques, such as differential scanning calorimeter and resistance measurement, are not applicable in a thin film of such a size. |
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