Implementation of optical character recognition (OCR) module on semiconductor etching tools for wafer tracking
This dissertation presents a brief introduction to the semiconductor industry and elaborates the implementation of a typical optical character recognition (OCR) module on one particular processing type of semiconductor processing tool, namely the etching tool. The OCR module was implemented to assis...
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| Format: | Thesis |
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2008
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| Online Access: | http://hdl.handle.net/10356/5924 |