Stress evaluation in thin films
We are in the midst of a major technology transition from alumni to copper as the metallization material. In the present study, a comprehensive examination of the change in the stress state due to this technology transition has been made, which is done by repeating the experiments that were done on...
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| Format: | Thesis |
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2008
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| Online Access: | http://hdl.handle.net/10356/5925 |