Design fundamental technologies self-latching MEMS optical switch with moving polymer waveguides
This research deals with some innovative technologies in MEMS (Micro Electro Mechanical Systems) and a novel optical switch based on them. A micro self-latching bi-stable actuator which is based on two innovative structures: a Fork Hinge structure, and a pre-compressed micro spring, is introduced in...
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| Format: | Thesis |
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2008
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| Online Access: | https://hdl.handle.net/10356/6052 |