Platform for multi-gate InxGa1-xAs nanostructure nmosfet by top-down approach

Scaling of conventional planar Si-based CMOS technology is reaching its limits towards the 16 nm technology node and further downscaling does not guarantee exponential performance improvement anymore due to various process control and reliability issues and fundamental constraints. Therefore, other...

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Bibliographic Details
Main Author: Ong, Beng Sheng
Other Authors: Pey Kin Leong
Format: Thesis
Language:English
Published: 2014
Subjects:
Online Access:http://hdl.handle.net/10356/60541

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