Nanoindentation studies of polyimide thin films on silicon substrates
With the advancements in microelectronic industry and extensive use of thin films in the micro-devices, there has been an increasing interest in characterising their mechanical properties especially since they could be different from the identical bulk material. Nanoindentation has become a widely u...
| Main Author: | |
|---|---|
| Other Authors: | |
| Format: | Thesis |
| Language: | English |
| Published: |
2014
|
| Subjects: | |
| Online Access: | http://hdl.handle.net/10356/60701 |