Probe mark bondability study for B6HFC wafer technology - in relation to die pad damage and exposed oxide

This dissertation covers the experimental analysis of probe mark bondability fo BiCMOS wafer where the bond pads of size 100 micrometer by 100 micrometer were subjected to a matrix of touchdown and overdrive settings at ambient temperature during the wafer probing process.

Bibliographische Detailangaben
1. Verfasser: Loh, Chee Ping.
Weitere Verfasser: Zhong, Zhaowei
Format: Abschlussarbeit
Veröffentlicht: 2008
Schlagworte:
Online Zugang:http://hdl.handle.net/10356/6086