Probe mark bondability study for B6HFC wafer technology - in relation to die pad damage and exposed oxide

This dissertation covers the experimental analysis of probe mark bondability fo BiCMOS wafer where the bond pads of size 100 micrometer by 100 micrometer were subjected to a matrix of touchdown and overdrive settings at ambient temperature during the wafer probing process.

Bibliographic Details
Main Author: Loh, Chee Ping.
Other Authors: Zhong, Zhaowei
Format: Thesis
Published: 2008
Subjects:
Online Access:http://hdl.handle.net/10356/6086
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author Loh, Chee Ping.
author2 Zhong, Zhaowei
author_facet Zhong, Zhaowei
Loh, Chee Ping.
author_sort Loh, Chee Ping.
collection NTU
description This dissertation covers the experimental analysis of probe mark bondability fo BiCMOS wafer where the bond pads of size 100 micrometer by 100 micrometer were subjected to a matrix of touchdown and overdrive settings at ambient temperature during the wafer probing process.
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institution Nanyang Technological University
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spelling ntu-10356/60862023-03-11T17:21:10Z Probe mark bondability study for B6HFC wafer technology - in relation to die pad damage and exposed oxide Loh, Chee Ping. Zhong, Zhaowei School of Mechanical and Production Engineering DRNTU::Engineering::Manufacturing This dissertation covers the experimental analysis of probe mark bondability fo BiCMOS wafer where the bond pads of size 100 micrometer by 100 micrometer were subjected to a matrix of touchdown and overdrive settings at ambient temperature during the wafer probing process. Master of Science (Precision Engineering) 2008-09-17T11:06:27Z 2008-09-17T11:06:27Z 2003 2003 Thesis http://hdl.handle.net/10356/6086 Nanyang Technological University application/pdf
spellingShingle DRNTU::Engineering::Manufacturing
Loh, Chee Ping.
Probe mark bondability study for B6HFC wafer technology - in relation to die pad damage and exposed oxide
title Probe mark bondability study for B6HFC wafer technology - in relation to die pad damage and exposed oxide
title_full Probe mark bondability study for B6HFC wafer technology - in relation to die pad damage and exposed oxide
title_fullStr Probe mark bondability study for B6HFC wafer technology - in relation to die pad damage and exposed oxide
title_full_unstemmed Probe mark bondability study for B6HFC wafer technology - in relation to die pad damage and exposed oxide
title_short Probe mark bondability study for B6HFC wafer technology - in relation to die pad damage and exposed oxide
title_sort probe mark bondability study for b6hfc wafer technology in relation to die pad damage and exposed oxide
topic DRNTU::Engineering::Manufacturing
url http://hdl.handle.net/10356/6086
work_keys_str_mv AT lohcheeping probemarkbondabilitystudyforb6hfcwafertechnologyinrelationtodiepaddamageandexposedoxide