Fabrication of 3D microstructures using focused ion beam milling

This research project looked into the possibility of developing the real 3D cavities using focused ion beam (FIB) milling.

Bibliographic Details
Main Author:	Loo, Yee Wei.
Other Authors:	Ngoi, Bryan Kok Ann
Format:	Thesis
Published:	2008
Subjects:	DRNTU::Engineering::Manufacturing
Online Access:	http://hdl.handle.net/10356/6101

Internet

http://hdl.handle.net/10356/6101