Piezoresponse force microscopy characterization of PbZr0.52Ti0.48O3 thin films deposited by sol-gel and pulsed laser deposition
In this report, PbZr0.52Ti0.48O3 thin films deposited via sol-gel method and pulsed laser deposition (PLD) were investigated using Piezoresponse Force Microscopy (PFM) for microscopic piezoelectric characteristic measurements. Electrical properties including dielectric, ferroelectric, and piezoelect...
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| Format: | Final Year Project (FYP) |
| Language: | English |
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2015
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| Online Access: | http://hdl.handle.net/10356/62008 |
| _version_ | 1826116447573639168 |
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| author | Tan, Jun Ming |
| author2 | Chen Lang |
| author_facet | Chen Lang Tan, Jun Ming |
| author_sort | Tan, Jun Ming |
| collection | NTU |
| description | In this report, PbZr0.52Ti0.48O3 thin films deposited via sol-gel method and pulsed laser deposition (PLD) were investigated using Piezoresponse Force Microscopy (PFM) for microscopic piezoelectric characteristic measurements. Electrical properties including dielectric, ferroelectric, and piezoelectric were characterized to determine the ferroelectric nature of the films. The PFM scanned images represent topography, amplitude and phase information along in-plane and out-of-plane directions, which also include domain orientation details. The PLD deposited thin film showed strong piezoresponse signals along the out-of-plane orientation as compared to the sol-gel film. The results and discussion provide a better understanding of the localized surface morphology, ferroelectric and piezoelectric properties of the PZT thin films in the nanoscale range. |
| first_indexed | 2024-10-01T04:11:53Z |
| format | Final Year Project (FYP) |
| id | ntu-10356/62008 |
| institution | Nanyang Technological University |
| language | English |
| last_indexed | 2024-10-01T04:11:53Z |
| publishDate | 2015 |
| record_format | dspace |
| spelling | ntu-10356/620082023-03-04T15:32:48Z Piezoresponse force microscopy characterization of PbZr0.52Ti0.48O3 thin films deposited by sol-gel and pulsed laser deposition Tan, Jun Ming Chen Lang School of Materials Science and Engineering DRNTU::Engineering::Materials::Microelectronics and semiconductor materials::Thin films In this report, PbZr0.52Ti0.48O3 thin films deposited via sol-gel method and pulsed laser deposition (PLD) were investigated using Piezoresponse Force Microscopy (PFM) for microscopic piezoelectric characteristic measurements. Electrical properties including dielectric, ferroelectric, and piezoelectric were characterized to determine the ferroelectric nature of the films. The PFM scanned images represent topography, amplitude and phase information along in-plane and out-of-plane directions, which also include domain orientation details. The PLD deposited thin film showed strong piezoresponse signals along the out-of-plane orientation as compared to the sol-gel film. The results and discussion provide a better understanding of the localized surface morphology, ferroelectric and piezoelectric properties of the PZT thin films in the nanoscale range. Bachelor of Engineering (Materials Engineering) 2015-01-05T02:37:11Z 2015-01-05T02:37:11Z 2011 2011 Final Year Project (FYP) http://hdl.handle.net/10356/62008 en Nanyang Technological University 39 p. application/pdf |
| spellingShingle | DRNTU::Engineering::Materials::Microelectronics and semiconductor materials::Thin films Tan, Jun Ming Piezoresponse force microscopy characterization of PbZr0.52Ti0.48O3 thin films deposited by sol-gel and pulsed laser deposition |
| title | Piezoresponse force microscopy characterization of PbZr0.52Ti0.48O3 thin films deposited by sol-gel and pulsed laser deposition |
| title_full | Piezoresponse force microscopy characterization of PbZr0.52Ti0.48O3 thin films deposited by sol-gel and pulsed laser deposition |
| title_fullStr | Piezoresponse force microscopy characterization of PbZr0.52Ti0.48O3 thin films deposited by sol-gel and pulsed laser deposition |
| title_full_unstemmed | Piezoresponse force microscopy characterization of PbZr0.52Ti0.48O3 thin films deposited by sol-gel and pulsed laser deposition |
| title_short | Piezoresponse force microscopy characterization of PbZr0.52Ti0.48O3 thin films deposited by sol-gel and pulsed laser deposition |
| title_sort | piezoresponse force microscopy characterization of pbzr0 52ti0 48o3 thin films deposited by sol gel and pulsed laser deposition |
| topic | DRNTU::Engineering::Materials::Microelectronics and semiconductor materials::Thin films |
| url | http://hdl.handle.net/10356/62008 |
| work_keys_str_mv | AT tanjunming piezoresponseforcemicroscopycharacterizationofpbzr052ti048o3thinfilmsdepositedbysolgelandpulsedlaserdeposition |