Study of femtosecond laser pulse drilling of silicon
Femtosecond (fs) laser drilling has been proved to be an efficient tool to drill various materials. In the drilling process, however, there are constant needs to eliminate spatter, control the taper, increase the aspect ratio and material removal rate. In addition, it is necessary to further underst...
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| Format: | Thesis |
| Language: | English |
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2015
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| Online Access: | https://hdl.handle.net/10356/62050 |