Reference-free beam-sampling (RFBS) methodology and system for optical freeform surface measurements
Freeform surfaces of optical quality are of huge demand in the precision and optical industry. Although six degree-of-freedom manufacturing technologies are available to fabricate such surfaces, the metrology infrastructure cannot simultaneously perform accurate, universal and non-contact large area...
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| Format: | Thesis |
| Language: | English |
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2015
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| Online Access: | http://hdl.handle.net/10356/62336 |