High-κ/metal gate for advanced transistor applications
Advanced HfO2 high-κ materials have been developed to replace SiO2 as the gate dielectrics. The Electronic structures consisting of various HfO2/SiO2/Si-substrate gate stacks have been characterized. The hafnium silicate formed at the HfO2/SiO2 interface is found to play a key role in generating an...
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| Format: | Thesis |
| Language: | English |
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2015
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| Online Access: | https://hdl.handle.net/10356/62510 |