Quasi electrical contact behaviors of metal micro-contacts for micro/nano-electromechanical systems (MEMS/NEMS)
The electrical contact behavior of metal micro-contacts is of significant importance in various fields of science and engineering, and it has not yet been adequately understood compared to the bulk metal contacts. Specifically, in DC contact type of microelectromechanical (MEMS) or nanoelectromechan...
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| Format: | Thesis |
| Language: | English |
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2015
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| Online Access: | https://hdl.handle.net/10356/65051 |