Investigations into laser interferometric calibration of 2D scanning stages
Coordinate Measuring Machine (CMM) with three moving axes is commonly used for measuring the three dimensional geometrical features of engineering components. Apart from CMM, two-dimensional measuring equipment with a scanning probe is also capable to carry out measurements on engineering c...
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| Format: | Thesis |
| Language: | English |
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2015
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| Online Access: | http://hdl.handle.net/10356/65153 |