Competitive analysis and conceptual design of semi equipment communication standards and middleware technology
This dissertation focuses on issues concerned with the equipment integration in the semiconductor industry. The objective of this dissertation is to provide a competitive analysis on the available software provided by different vendors and based on the analysis; the dissertation proposes a better so...
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| Format: | Thesis |
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2008
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| Online Access: | http://hdl.handle.net/10356/6545 |