Competitive analysis and conceptual design of semi equipment communication standards and middleware technology
This dissertation focuses on issues concerned with the equipment integration in the semiconductor industry. The objective of this dissertation is to provide a competitive analysis on the available software provided by different vendors and based on the analysis; the dissertation proposes a better so...
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| Format: | Thesis |
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2008
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| Online Access: | http://hdl.handle.net/10356/6545 |
| _version_ | 1824455807040749568 |
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| author | Tin Oo. |
| author2 | Goh, Kiah Mok |
| author_facet | Goh, Kiah Mok Tin Oo. |
| author_sort | Tin Oo. |
| collection | NTU |
| description | This dissertation focuses on issues concerned with the equipment integration in the semiconductor industry. The objective of this dissertation is to provide a competitive analysis on the available software provided by different vendors and based on the analysis; the dissertation proposes a better solution to overcome the limitation faced by the existing solution. |
| first_indexed | 2025-02-19T03:44:04Z |
| format | Thesis |
| id | ntu-10356/6545 |
| institution | Nanyang Technological University |
| last_indexed | 2025-02-19T03:44:04Z |
| publishDate | 2008 |
| record_format | dspace |
| spelling | ntu-10356/65452023-03-11T17:22:41Z Competitive analysis and conceptual design of semi equipment communication standards and middleware technology Tin Oo. Goh, Kiah Mok School of Mechanical and Production Engineering DRNTU::Engineering::Systems engineering This dissertation focuses on issues concerned with the equipment integration in the semiconductor industry. The objective of this dissertation is to provide a competitive analysis on the available software provided by different vendors and based on the analysis; the dissertation proposes a better solution to overcome the limitation faced by the existing solution. Master of Science (Computer Integrated Manufacturing) 2008-09-17T11:17:45Z 2008-09-17T11:17:45Z 2003 2003 Thesis http://hdl.handle.net/10356/6545 Nanyang Technological University application/pdf |
| spellingShingle | DRNTU::Engineering::Systems engineering Tin Oo. Competitive analysis and conceptual design of semi equipment communication standards and middleware technology |
| title | Competitive analysis and conceptual design of semi equipment communication standards and middleware technology |
| title_full | Competitive analysis and conceptual design of semi equipment communication standards and middleware technology |
| title_fullStr | Competitive analysis and conceptual design of semi equipment communication standards and middleware technology |
| title_full_unstemmed | Competitive analysis and conceptual design of semi equipment communication standards and middleware technology |
| title_short | Competitive analysis and conceptual design of semi equipment communication standards and middleware technology |
| title_sort | competitive analysis and conceptual design of semi equipment communication standards and middleware technology |
| topic | DRNTU::Engineering::Systems engineering |
| url | http://hdl.handle.net/10356/6545 |
| work_keys_str_mv | AT tinoo competitiveanalysisandconceptualdesignofsemiequipmentcommunicationstandardsandmiddlewaretechnology |