Micro-systems mechanics Vol. IV
With the ever-increasing need for larger capacity of hard disk drives (HDDs), conventional servo mechanism - voice coil motor (VCM) - has become a main barrier for higher areal density recording (over 50Gb/in2). In this work, we present a novel micro electrostatic actuator capable of 2-dimensional f...
| Main Authors: | , |
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| Format: | Research Report |
| Published: |
2008
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| Online Access: | http://hdl.handle.net/10356/6846 |