Calibration and accuracy improvement of miniaturized optical system for in-situ roughness measurement

In engineering and manufacturing fields, the surface must be under certain limits of roughness to ensure proper functionality and performance. Therefore, measuring surface roughness is vital to quality control in manufacturing industry. This study is first to develop an in-situ measurement system...

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Bibliographic Details
Main Author: Fu, Shaowei
Other Authors: David Lee Butler
Format: Thesis
Language:English
Published: 2016
Subjects:
Online Access:http://hdl.handle.net/10356/68668