Development of MEMS devices for vibration and acoustic sensing and actuation applications
This report presents the development of MEMS devices for vibration and acoustic sensing and actuation applications under project JT ARC 6/97. In this project, a total of 23 international journal papers and 14 conference papers have been produced. The project was actually kicked off early 1998. We h...
| Main Authors: | , , , , |
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| 其他作者: | |
| 格式: | Research Report |
| 出版: |
2008
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| 主題: | |
| 在線閱讀: | http://hdl.handle.net/10356/6919 |