Improvement of micro-strip GaN-on-SiC backside via-holes process

When people think of power electronics applications for wide-bandgap semiconductor materials, they often consider silicon carbide or gallium nitride. This is not surprising, as silicon carbide and gallium nitride are the wideband gap semiconductors used in the world's most advanced power ele...

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Bibliographic Details
Main Author: Yu, Zhuoran
Other Authors: Wang Hong
Format: Thesis
Language:English
Published: 2019
Subjects:
Online Access:http://hdl.handle.net/10356/78797