Dynamic measurement of micro-components by image-plane digital holography
A method for whole-field non-contact measurement of displacement, velocity and acceleration of a vibrating microobject based on digital holographic microscopy is presented. A micro-beam is excited by a fluctuating voltage with a sinusoidal configuration. A series of digital holograms are captured...
Main Authors: | , , , |
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Other Authors: | |
Format: | Conference Paper |
Language: | English |
Published: |
2010
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Subjects: | |
Online Access: | https://hdl.handle.net/10356/79244 http://hdl.handle.net/10220/6479 |