Multi-colour microscopic interferometry for optical metrology and imaging applications
Interferometry has been widely used for optical metrology and imaging applications because of their precision, reliability, and versatility. Although single-wavelength interferometery can provide high sensitivity and resolution, it has several drawbacks, namely, it fails to quantify large-discontinu...
| Main Authors: | , , , |
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| Other Authors: | |
| Format: | Journal Article |
| Language: | English |
| Published: |
2016
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| Subjects: | |
| Online Access: | https://hdl.handle.net/10356/80246 http://hdl.handle.net/10220/40566 |