Multi-colour microscopic interferometry for optical metrology and imaging applications

Interferometry has been widely used for optical metrology and imaging applications because of their precision, reliability, and versatility. Although single-wavelength interferometery can provide high sensitivity and resolution, it has several drawbacks, namely, it fails to quantify large-discontinu...

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Main Authors: Upputuri, Paul Kumar, Pramanik, Manojit, Nandigana, Krishna Mohan, Kothiyal, Mahendra Prasad
Other Authors: School of Chemical and Biomedical Engineering
Format: Journal Article
Language:English
Published: 2016
Subjects:
Online Access:https://hdl.handle.net/10356/80246
http://hdl.handle.net/10220/40566
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author Upputuri, Paul Kumar
Pramanik, Manojit
Nandigana, Krishna Mohan
Kothiyal, Mahendra Prasad
author2 School of Chemical and Biomedical Engineering
author_facet School of Chemical and Biomedical Engineering
Upputuri, Paul Kumar
Pramanik, Manojit
Nandigana, Krishna Mohan
Kothiyal, Mahendra Prasad
author_sort Upputuri, Paul Kumar
collection NTU
description Interferometry has been widely used for optical metrology and imaging applications because of their precision, reliability, and versatility. Although single-wavelength interferometery can provide high sensitivity and resolution, it has several drawbacks, namely, it fails to quantify large-discontinuities, large-deformations, and shape of unpolished surfaces. Multiple-wavelength techniques have been successfully used to overcome the drawbacks associated with single wavelength analysis. The use of colour CCD camera allows simultaneous acquisition of multiple interferograms. The advances in colour CCD cameras and image processing techniques have made the multi-colour interferometry a faster, simpler, and cost-effective tool for industrial applications. This article reviews the recent advances in multi-colour interferometric techniques and their demanding applications for characterization of micro-systems, non-destructive testing, and bio-imaging applications.
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spelling ntu-10356/802462023-12-29T06:52:52Z Multi-colour microscopic interferometry for optical metrology and imaging applications Upputuri, Paul Kumar Pramanik, Manojit Nandigana, Krishna Mohan Kothiyal, Mahendra Prasad School of Chemical and Biomedical Engineering Interferometry Multiple-wavelength Colour CCD Microsystems Bio-imaging Interferometry has been widely used for optical metrology and imaging applications because of their precision, reliability, and versatility. Although single-wavelength interferometery can provide high sensitivity and resolution, it has several drawbacks, namely, it fails to quantify large-discontinuities, large-deformations, and shape of unpolished surfaces. Multiple-wavelength techniques have been successfully used to overcome the drawbacks associated with single wavelength analysis. The use of colour CCD camera allows simultaneous acquisition of multiple interferograms. The advances in colour CCD cameras and image processing techniques have made the multi-colour interferometry a faster, simpler, and cost-effective tool for industrial applications. This article reviews the recent advances in multi-colour interferometric techniques and their demanding applications for characterization of micro-systems, non-destructive testing, and bio-imaging applications. MOE (Min. of Education, S’pore) Accepted version 2016-05-23T07:33:18Z 2019-12-06T13:45:45Z 2016-05-23T07:33:18Z 2019-12-06T13:45:45Z 2016 2016 Journal Article 0143-8166 https://hdl.handle.net/10356/80246 http://hdl.handle.net/10220/40566 10.1016/j.optlaseng.2016.03.020 190763 en Optics and Lasers in Engineering © 2016 Elsevier Ltd. This is the author created version of a work that has been peer reviewed and accepted for publication by Optics and Lasers in Engineering, Elsevier. It incorporates referee’s comments but changes resulting from the publishing process, such as copyediting, structural formatting, may not be reflected in this document. The published version is available at: [http://dx.doi.org/10.1016/j.optlaseng.2016.03.020]. application/pdf
spellingShingle Interferometry
Multiple-wavelength
Colour CCD
Microsystems
Bio-imaging
Upputuri, Paul Kumar
Pramanik, Manojit
Nandigana, Krishna Mohan
Kothiyal, Mahendra Prasad
Multi-colour microscopic interferometry for optical metrology and imaging applications
title Multi-colour microscopic interferometry for optical metrology and imaging applications
title_full Multi-colour microscopic interferometry for optical metrology and imaging applications
title_fullStr Multi-colour microscopic interferometry for optical metrology and imaging applications
title_full_unstemmed Multi-colour microscopic interferometry for optical metrology and imaging applications
title_short Multi-colour microscopic interferometry for optical metrology and imaging applications
title_sort multi colour microscopic interferometry for optical metrology and imaging applications
topic Interferometry
Multiple-wavelength
Colour CCD
Microsystems
Bio-imaging
url https://hdl.handle.net/10356/80246
http://hdl.handle.net/10220/40566
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