Dual mode acoustic wave sensor for precise pressure reading

Dual mode acoustic wave sensor for precise pressure reading

In this letter, a Microelectromechanical system acoustic wave sensor, which has a dual mode (lateral field exited Lamb wave mode and surface acoustic wave (SAW) mode) behavior, is presented for precious pressure change read out. Comb-like interdigital structured electrodes on top of piezoelectric ma...

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Bibliographic Details
Main Authors: Mu, Xiaojing, Kropelnicki, Piotr, Wang, Yong, Randles, Andrew Benson, Chai, Kevin Tshun Chuan, Gu, Yuan Dong, Cai, H.
Other Authors: School of Electrical and Electronic Engineering
Format: Journal Article
Language:English
Published: 2015
Subjects:
Surface acoustic waves
Acoustic sensing
High pressure
Pressure measurement
Sound pressure
Online Access:https://hdl.handle.net/10356/81198
http://hdl.handle.net/10220/39208

Internet

https://hdl.handle.net/10356/81198
http://hdl.handle.net/10220/39208

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