Dual mode acoustic wave sensor for precise pressure reading
In this letter, a Microelectromechanical system acoustic wave sensor, which has a dual mode (lateral field exited Lamb wave mode and surface acoustic wave (SAW) mode) behavior, is presented for precious pressure change read out. Comb-like interdigital structured electrodes on top of piezoelectric ma...
| Main Authors: | , , , , , , |
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| 其他作者: | |
| 格式: | Journal Article |
| 语言: | English |
| 出版: |
2015
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| 主题: | |
| 在线阅读: | https://hdl.handle.net/10356/81198 http://hdl.handle.net/10220/39208 |