Grid-based simulation of industrial thin-film production
In this article, the authors introduce a Grid-based virtual reactor, a High Level Architecture (HLA)- supported problem-solving environment that allows for detailed numerical study of industrial thin-film production in plasma-enhanced chemical vapor deposition (PECVD) reactors. They briefly describe...
Main Authors: | , , |
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Other Authors: | |
Format: | Journal Article |
Language: | English |
Published: |
2013
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Online Access: | https://hdl.handle.net/10356/84460 http://hdl.handle.net/10220/10144 |