A nano-actuator via cavity-enhanced optical dipole force
In this paper, we demonstrate a nano-actuator using a silicon-based monolithic cavity nano-opto-mechanical system. The nano-actuator is constructed by a special designed nano-scale silicon suspended cantilever which is efficiently driven by the optical gradient force. In experiment, the actuator obt...
| Main Authors: | , , , , , , , |
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| Other Authors: | |
| Format: | Conference Paper |
| Language: | English |
| Published: |
2013
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| Subjects: | |
| Online Access: | https://hdl.handle.net/10356/84753 http://hdl.handle.net/10220/12484 |