Sputtered PdO decorated TiO2 sensing layer for a hydrogen gas sensor

Sputtered PdO decorated TiO2 sensing layer for a hydrogen gas sensor

We report a sputtered PdO decorated TiO2 sensing layer by radiofrequency (RF) sputtering methods and demonstrated gas sensing performance for H2 gas. We prepared sputtered anatase TiO2 sensing films with 200 nm thickness and deposited a Pd layer on top of the TiO2 films with a thickness ranging from...

Full description

Bibliographic Details
Main Authors: Lee, Jeong Hoon, Kwak, Seungmin, Lee, Jin-Hyung, Kim, Inho, Yoo, Yong Kyoung, Lee, Tae Hoon, Shim, Young-Seok, Kim, Jinseok, Lee, Kyu Hyoung
Other Authors: School of Electrical and Electronic Engineering
Format: Journal Article
Language:English
Published: 2018
Subjects:
Hydrogen Gas
PdO
Online Access:https://hdl.handle.net/10356/85171
http://hdl.handle.net/10220/45144

Internet

https://hdl.handle.net/10356/85171
http://hdl.handle.net/10220/45144

Similar Items