Rapid thermal processing of chemical-solution-deposited yttrium-doped barium zirconate thin films
In this paper, dense and crack-free yttrium-doped barium zirconate (BZY) thin films were fabricated by chemical solution deposition (CSD) with rapid thermal processing (RTP) at low sintering temperature. BZY thin film without barium carbonate phase was obtainable after annealing at 700 °C for 1 h, w...
| Main Authors: | , , , , |
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| Other Authors: | |
| Format: | Journal Article |
| Language: | English |
| Published: |
2017
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| Subjects: | |
| Online Access: | https://hdl.handle.net/10356/85461 http://hdl.handle.net/10220/43699 |