Strain relaxation of germanium-tin (GeSn) fins
Strain relaxation of biaxially strained Ge1-xSnx layer when it is patterned into Ge1-xSnx fin structures is studied. Ge1-xSnx-on-insulator (GeSnOI) substrate was realized using a direct wafer bonding (DWB) technique and Ge1-xSnx fin structures were formed by electron beam lithography (EBL) patternin...
Main Authors: | , , , , , , , , , , , , |
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Other Authors: | |
Format: | Journal Article |
Language: | English |
Published: |
2018
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Subjects: | |
Online Access: | https://hdl.handle.net/10356/86324 http://hdl.handle.net/10220/45270 |