MEMS Tunable Diffraction Grating for Spaceborne Imaging Spectroscopic Applications

Diffraction gratings are among the most commonly used optical elements in applications ranging from spectroscopy and metrology to lasers. Numerous methods have been adopted for the fabrication of gratings, including microelectromechanical system (MEMS) fabrication which is by now mature and presents...

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Bibliographic Details
Main Authors: Muttikulangara, Sanathanan Swaminathan, Baranski, Maciej, Rehman, Shakil, Hu, Liangxing, Miao, Jianmin
Other Authors: School of Mechanical and Aerospace Engineering
Format: Journal Article
Language:English
Published: 2018
Subjects:
Online Access:https://hdl.handle.net/10356/88096
http://hdl.handle.net/10220/44525