MEMS Tunable Diffraction Grating for Spaceborne Imaging Spectroscopic Applications
Diffraction gratings are among the most commonly used optical elements in applications ranging from spectroscopy and metrology to lasers. Numerous methods have been adopted for the fabrication of gratings, including microelectromechanical system (MEMS) fabrication which is by now mature and presents...
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| Formato: | Journal Article |
| Idioma: | English |
| Publicado em: |
2018
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| Acesso em linha: | https://hdl.handle.net/10356/88096 http://hdl.handle.net/10220/44525 |
| _version_ | 1826110418730352640 |
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| author | Muttikulangara, Sanathanan Swaminathan Baranski, Maciej Rehman, Shakil Hu, Liangxing Miao, Jianmin |
| author2 | School of Mechanical and Aerospace Engineering |
| author_facet | School of Mechanical and Aerospace Engineering Muttikulangara, Sanathanan Swaminathan Baranski, Maciej Rehman, Shakil Hu, Liangxing Miao, Jianmin |
| author_sort | Muttikulangara, Sanathanan Swaminathan |
| collection | NTU |
| description | Diffraction gratings are among the most commonly used optical elements in applications ranging from spectroscopy and metrology to lasers. Numerous methods have been adopted for the fabrication of gratings, including microelectromechanical system (MEMS) fabrication which is by now mature and presents opportunities for tunable gratings through inclusion of an actuation mechanism. We have designed, modeled, fabricated and tested a silicon based pitch tunable diffraction grating (PTG) with relatively large resolving power that could be deployed in a spaceborne imaging spectrometer, for example in a picosatellite. We have carried out a detailed analytical modeling of PTG, based on a mass spring system. The device has an effective fill factor of 52% and resolving power of 84. Tuning provided by electrostatic actuation results in a displacement of 2.7 μm at 40 V . Further, we have carried out vibration testing of the fabricated structure to evaluate its feasibility for spaceborne instruments. |
| first_indexed | 2024-10-01T02:34:06Z |
| format | Journal Article |
| id | ntu-10356/88096 |
| institution | Nanyang Technological University |
| language | English |
| last_indexed | 2024-10-01T02:34:06Z |
| publishDate | 2018 |
| record_format | dspace |
| spelling | ntu-10356/880962023-03-04T17:12:06Z MEMS Tunable Diffraction Grating for Spaceborne Imaging Spectroscopic Applications Muttikulangara, Sanathanan Swaminathan Baranski, Maciej Rehman, Shakil Hu, Liangxing Miao, Jianmin School of Mechanical and Aerospace Engineering Singapore-MIT Alliance Programme Tunable Diffraction Grating Optical Components Diffraction gratings are among the most commonly used optical elements in applications ranging from spectroscopy and metrology to lasers. Numerous methods have been adopted for the fabrication of gratings, including microelectromechanical system (MEMS) fabrication which is by now mature and presents opportunities for tunable gratings through inclusion of an actuation mechanism. We have designed, modeled, fabricated and tested a silicon based pitch tunable diffraction grating (PTG) with relatively large resolving power that could be deployed in a spaceborne imaging spectrometer, for example in a picosatellite. We have carried out a detailed analytical modeling of PTG, based on a mass spring system. The device has an effective fill factor of 52% and resolving power of 84. Tuning provided by electrostatic actuation results in a displacement of 2.7 μm at 40 V . Further, we have carried out vibration testing of the fabricated structure to evaluate its feasibility for spaceborne instruments. NRF (Natl Research Foundation, S’pore) EDB (Economic Devt. Board, S’pore) Published version 2018-03-07T05:37:17Z 2019-12-06T16:55:54Z 2018-03-07T05:37:17Z 2019-12-06T16:55:54Z 2017 Journal Article Muttikulangara, S. S., Baranski, M., Rehman, S., Hu, L., & Miao, J. (2017). MEMS Tunable Diffraction Grating for Spaceborne Imaging Spectroscopic Applications. Sensors, 17(10), 2372-. 1424-8220 https://hdl.handle.net/10356/88096 http://hdl.handle.net/10220/44525 10.3390/s17102372 en Sensors © 2017 by The Author(s). Licensee MDPI, Basel, Switzerland. This article is an open access article distributed under the terms and conditions of the Creative Commons Attribution (CC BY) license (http://creativecommons.org/licenses/by/4.0/). 13 p. application/pdf |
| spellingShingle | Tunable Diffraction Grating Optical Components Muttikulangara, Sanathanan Swaminathan Baranski, Maciej Rehman, Shakil Hu, Liangxing Miao, Jianmin MEMS Tunable Diffraction Grating for Spaceborne Imaging Spectroscopic Applications |
| title | MEMS Tunable Diffraction Grating for Spaceborne Imaging Spectroscopic Applications |
| title_full | MEMS Tunable Diffraction Grating for Spaceborne Imaging Spectroscopic Applications |
| title_fullStr | MEMS Tunable Diffraction Grating for Spaceborne Imaging Spectroscopic Applications |
| title_full_unstemmed | MEMS Tunable Diffraction Grating for Spaceborne Imaging Spectroscopic Applications |
| title_short | MEMS Tunable Diffraction Grating for Spaceborne Imaging Spectroscopic Applications |
| title_sort | mems tunable diffraction grating for spaceborne imaging spectroscopic applications |
| topic | Tunable Diffraction Grating Optical Components |
| url | https://hdl.handle.net/10356/88096 http://hdl.handle.net/10220/44525 |
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