MEMS Tunable Diffraction Grating for Spaceborne Imaging Spectroscopic Applications

Diffraction gratings are among the most commonly used optical elements in applications ranging from spectroscopy and metrology to lasers. Numerous methods have been adopted for the fabrication of gratings, including microelectromechanical system (MEMS) fabrication which is by now mature and presents...

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Detalhes bibliográficos
Principais autores: Muttikulangara, Sanathanan Swaminathan, Baranski, Maciej, Rehman, Shakil, Hu, Liangxing, Miao, Jianmin
Outros Autores: School of Mechanical and Aerospace Engineering
Formato: Journal Article
Idioma:English
Publicado em: 2018
Assuntos:
Acesso em linha:https://hdl.handle.net/10356/88096
http://hdl.handle.net/10220/44525

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