Efficient approach to cyclic scheduling of single-arm cluster tools with chamber cleaning operations and wafer residency time constraint
In semiconductor manufacturing, with the shrinking down of wafer circuit widths, a strict quality control is required for wafer fabrication processes, resulting in that after a wafer being processed and removed from a chamber, a cleaning operation that takes significant time is performed for elimina...
| Main Authors: | , , , , , , |
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| Other Authors: | |
| Format: | Journal Article |
| Language: | English |
| Published: |
2018
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| Subjects: | |
| Online Access: | https://hdl.handle.net/10356/88431 http://hdl.handle.net/10220/44649 |