Improvement of the pad wear shape in fixed abrasive chemical-mechanical polishing for manufacturing optical components
Fixed abrasive chemical mechanical polishing has some advantages in generating planarity surfaces of optical components. The surface after polishing has better uniformity, and the material removal rate is much more than the traditional chemical mechanical polishing. The pad wear shape has a signific...
| Main Authors: | , , |
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| Other Authors: | |
| Format: | Conference Paper |
| Language: | English |
| Published: |
2018
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| Subjects: | |
| Online Access: | https://hdl.handle.net/10356/88737 http://hdl.handle.net/10220/46966 |