Scheduling and control of start-up process for time-constrained single-arm cluster tools with parallel chambers

In wafer manufacturing, with the shrinking down of wafer lot size, cluster tools are frequently required to switch from handling one lot of wafers to another, resulting in more transient processes, including start-up and close-down processes. In the existing work, optimal scheduling of start-up proc...

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מידע ביבליוגרפי
Main Authors: Yang, FaJun, Qiao, Yan, Gao, KaiZhou, Wu, NaiQi, Zhu, YuTing, Simon, Ian Ware, Su, Rong
מחברים אחרים: School of Electrical and Electronic Engineering
פורמט: Journal Article
שפה:English
יצא לאור: 2018
נושאים:
גישה מקוונת:https://hdl.handle.net/10356/90205
http://hdl.handle.net/10220/47191