Comprehensive study of ZnO films prepared by filtered cathodic vacuum arc at room temperature

Comprehensive study of ZnO films prepared by filtered cathodic vacuum arc at room temperature

Room temperature deposition of high crystal quality zinc oxide (ZnO) films was realized by the filtered cathodic vacuum arc (FCVA) technique. Detrimental macroparticles in the plasma as byproducts of arcing process are removed with an off-plane double bend magnetic filter. The influence of oxygen...

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Bibliographic Details
Main Authors: Wang, Y. G., Lau, S. P., Lee, H. W., Yu, S. F., Tay, B. K., Zhang, X. H., Tse, K. Y., Hng, H. H.
Other Authors: School of Electrical and Electronic Engineering
Format: Journal Article
Language:English
Published: 2014
Subjects:
DRNTU::Engineering::Materials::Microelectronics and semiconductor materials::Thin films
Online Access:https://hdl.handle.net/10356/90403
http://hdl.handle.net/10220/18826

Internet

https://hdl.handle.net/10356/90403
http://hdl.handle.net/10220/18826

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