Dielectric functions of densely stacked Si nanocrystal layer embedded in SiO2 thin films

Dielectric functions of densely stacked Si nanocrystal layer embedded in SiO2 thin films

A densely stacked silicon nanocrystal layer embedded in a SiO2 thin film is synthesized with Si ion implantation. The dielectric functions of the nanocrystal layer are determined with spectroscopic ellipsometry. The dielectric functions show a significant suppression as compared to that of bulk crys...

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Bibliographic Details
Main Authors: Ding, Liang, Chen, Tupei, Wong, Jen It, Yang, Ming, Liu, Yang, Ng, Chi Yung, Liu, Yu Chan, Tung, Chih Hang, Trigg, Alastair David, Fung, Stevenson Hon Yuen
Other Authors: A*STAR SIMTech
Format: Journal Article
Language:English
Published: 2010
Subjects:
DRNTU::Engineering::Electrical and electronic engineering::Nanoelectronics
Online Access:https://hdl.handle.net/10356/91065
http://hdl.handle.net/10220/6401

Internet

https://hdl.handle.net/10356/91065
http://hdl.handle.net/10220/6401

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