Vibration measurement of a micro-structure by digital holographic microscopy
A method for the vibration measurement of a micro-electro-mechanical system (MEMS) structure based on digital holographic microscopy (DHM) is presented. A sequence of digital holograms of a vibrating micro-beam excited by varying voltage is captured by a high-speed CCD camera. The phase changes of t...
| Main Authors: | , , , , |
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| Other Authors: | |
| Format: | Journal Article |
| Language: | English |
| Published: |
2011
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| Subjects: | |
| Online Access: | https://hdl.handle.net/10356/91208 http://hdl.handle.net/10220/6700 |