Vibration measurement of a micro-structure by digital holographic microscopy

A method for the vibration measurement of a micro-electro-mechanical system (MEMS) structure based on digital holographic microscopy (DHM) is presented. A sequence of digital holograms of a vibrating micro-beam excited by varying voltage is captured by a high-speed CCD camera. The phase changes of t...

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Bibliographic Details
Main Authors: Shi, Hongjian, Fu, Yu, Quan, Chenggen, Tay, Cho Jui, He, Xiaoling
Other Authors: Temasek Laboratories
Format: Journal Article
Language:English
Published: 2011
Subjects:
Online Access:https://hdl.handle.net/10356/91208
http://hdl.handle.net/10220/6700