Vibration measurement of a micro-structure by digital holographic microscopy
A method for the vibration measurement of a micro-electro-mechanical system (MEMS) structure based on digital holographic microscopy (DHM) is presented. A sequence of digital holograms of a vibrating micro-beam excited by varying voltage is captured by a high-speed CCD camera. The phase changes of t...
| Main Authors: | , , , , |
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| Other Authors: | |
| Format: | Journal Article |
| Language: | English |
| Published: |
2011
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| Subjects: | |
| Online Access: | https://hdl.handle.net/10356/91208 http://hdl.handle.net/10220/6700 |
| _version_ | 1811696682184736768 |
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| author | Shi, Hongjian Fu, Yu Quan, Chenggen Tay, Cho Jui He, Xiaoling |
| author2 | Temasek Laboratories |
| author_facet | Temasek Laboratories Shi, Hongjian Fu, Yu Quan, Chenggen Tay, Cho Jui He, Xiaoling |
| author_sort | Shi, Hongjian |
| collection | NTU |
| description | A method for the vibration measurement of a micro-electro-mechanical system (MEMS) structure based on digital holographic microscopy (DHM) is presented. A sequence of digital holograms of a vibrating micro-beam excited by varying voltage is captured by a high-speed CCD camera. The phase changes of the object at different instants are obtained by digital reconstruction.
The displacement, velocity and acceleration are evaluated by both spatial and temporal Fourier and
windowed Fourier analyses. The results show that digital holographic microscopy with Fourier
analyses is an effective method for evaluating the dynamic characteristics of a MEMS component. |
| first_indexed | 2024-10-01T07:43:14Z |
| format | Journal Article |
| id | ntu-10356/91208 |
| institution | Nanyang Technological University |
| language | English |
| last_indexed | 2024-10-01T07:43:14Z |
| publishDate | 2011 |
| record_format | dspace |
| spelling | ntu-10356/912082020-09-26T22:19:20Z Vibration measurement of a micro-structure by digital holographic microscopy Shi, Hongjian Fu, Yu Quan, Chenggen Tay, Cho Jui He, Xiaoling Temasek Laboratories DRNTU::Science::Physics::Optics and light A method for the vibration measurement of a micro-electro-mechanical system (MEMS) structure based on digital holographic microscopy (DHM) is presented. A sequence of digital holograms of a vibrating micro-beam excited by varying voltage is captured by a high-speed CCD camera. The phase changes of the object at different instants are obtained by digital reconstruction. The displacement, velocity and acceleration are evaluated by both spatial and temporal Fourier and windowed Fourier analyses. The results show that digital holographic microscopy with Fourier analyses is an effective method for evaluating the dynamic characteristics of a MEMS component. Accepted version 2011-01-25T03:40:46Z 2019-12-06T18:01:37Z 2011-01-25T03:40:46Z 2019-12-06T18:01:37Z 2009 2009 Journal Article Shi, H., Fu, Y., Quan, C., Tay, C. J., & He, X. (2009). Vibration measurement of a micro-structure by digital holographic microscopy. Measurement Science and Technology, 20(6). 0957-0233 https://hdl.handle.net/10356/91208 http://hdl.handle.net/10220/6700 10.1088/0957-0233/20/6/065301 en Measurement science and technology This is the author created version of a work that has been peer reviewed and accepted for publication by Measurement Science & Technology, IOP Publishing Ltd. It incorporates referee’s comments but changes resulting from the publishing process, such as copyediting, structural formatting, may not be reflected in this document. The published version is available at: [DOI:http://dx.doi.org/10.1088/0957-0233/20/6/065301]. 21 p. application/pdf |
| spellingShingle | DRNTU::Science::Physics::Optics and light Shi, Hongjian Fu, Yu Quan, Chenggen Tay, Cho Jui He, Xiaoling Vibration measurement of a micro-structure by digital holographic microscopy |
| title | Vibration measurement of a micro-structure by digital holographic microscopy |
| title_full | Vibration measurement of a micro-structure by digital holographic microscopy |
| title_fullStr | Vibration measurement of a micro-structure by digital holographic microscopy |
| title_full_unstemmed | Vibration measurement of a micro-structure by digital holographic microscopy |
| title_short | Vibration measurement of a micro-structure by digital holographic microscopy |
| title_sort | vibration measurement of a micro structure by digital holographic microscopy |
| topic | DRNTU::Science::Physics::Optics and light |
| url | https://hdl.handle.net/10356/91208 http://hdl.handle.net/10220/6700 |
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