MEMS-micropumps : a review
Microfluidics has emerged from the MEMS-technology as an important research field and a promising market. This paper gives an overview on one of the most important microfluidic components: the micropump. In the last decade, various micropumps have been developed. There are only a few review papers o...
| Main Authors: | , , |
|---|---|
| Other Authors: | |
| Format: | Journal Article |
| Language: | English |
| Published: |
2012
|
| Subjects: | |
| Online Access: | https://hdl.handle.net/10356/93856 http://hdl.handle.net/10220/7806 |