Fabrication and experimental characterization of nanochannels
Nanofluidics is the science and technology involving a fluid flowing in or around structures with a least one dimension in the nanoscale, which is defined as the range from 1 nm to 100 nm. In this paper, we present the fabrication and characterization of nanochannels in silicon and glass. Since the...
| Main Authors: | , , |
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| Other Authors: | |
| Format: | Conference Paper |
| Language: | English |
| Published: |
2012
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| Subjects: | |
| Online Access: | https://hdl.handle.net/10356/94172 http://hdl.handle.net/10220/7705 |