CMOS-compatible nanowire sensor arrays for detection of cellular bioelectricity
Perfectly aligned arrays of long silicon nanowires fabricated using a top–down complementary metal oxide semiconductor (CMOS) compatible approach and their ability for real-time extracellular recording of cellular bioelectricity are presented. The technique enables noninvasive, high-sensitivity, hig...
| Main Authors: | , , , , |
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| Other Authors: | |
| Format: | Journal Article |
| Language: | English |
| Published: |
2012
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| Subjects: | |
| Online Access: | https://hdl.handle.net/10356/94400 http://hdl.handle.net/10220/7487 |