Micro-Raman spectroscopy investigation of nickel silicides and nickel (platinum) silicides
The formation of Ni silicides has been successfully monitored by Raman spectroscopy. Ni silicides formed at different annealing temperatures using rapid thermal annealing were analyzed using Rutherford backscattering spectroscopy and X-ray diffraction. Raman spectroscopy was further us...
| Auteurs principaux: | , , , , , , |
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| Autres auteurs: | |
| Format: | Journal Article |
| Langue: | English |
| Publié: |
2012
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| Sujets: | |
| Accès en ligne: | https://hdl.handle.net/10356/94700 http://hdl.handle.net/10220/8060 |